FIELD: physics, optics.
SUBSTANCE: device has a base and a plurality of convex and concave structural elements arranged on the surface of the base with spacing which is equal to or less than the wavelength of visible light. The structural elements form a plurality of tracks and form a structure of a quadrangular or quasi-quadrangular array. In one version, each structural element has the shape of an elliptical or truncated elliptical cone, the long axis of which is parallel to the track. In another version, the ratio ((2r/P1)×100) of the diameter 2r to the spacing P1 is 127% or higher, where P1 is the spacing between structural elements on the same track, and 2r is the diameter of the lower surface of the structural element in the direction of the track. The method is carried out by forming a resist layer on the peripheral surface of a columnar or cylindrical standard mould, forming latent images via interrupted irradiation of the resist layer with a laser beam while rotating the standard mould with relative displacement of the laser beam spot parallel to its central axis, forming a resist structure via development thereof and forming structural elements by etching using the resist structure as a mask.
EFFECT: improved antireflection characteristics.
12 cl, 6 tbl, 67 dwg
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Authors
Dates
2014-07-20—Published
2009-02-27—Filed