FIELD: electricity.
SUBSTANCE: device to monitor semiconductor products by second derivatives of current-voltage and volt-coulomb characteristics comprises an analogue-digital converter (ADC), a computer, a monitor, a digital-analogue converter (DAC), a control circuit, a unit of biharmonic signal generation, the outlet of which is connected to an inlet of the semiconductor product, and the inlet is connected to the first outlet of the control circuit, a controlled voltage source (CVS), the outlet of which is also connected to the inlet of the semiconductor product, and the inlet is connected to the second outlet of the control circuit, a unit of measurements of an information signal, the inlet of which is connected to the outlet of the semiconductor product, and the outlet is connected to the inlet of ADC.
EFFECT: invention makes it possible to increase sensitivity to detection of hidden defects and to increase functional capabilities of semiconductor product monitoring using additional primary diagnostics information in the form of the second derivative of the volt-coulomb characteristic.
1 dwg
