FIELD: engines and pumps.
SUBSTANCE: injector-type pump 2 makes an integral part of system 1 to create ultrahigh vacuum. Said pump comprises, at least, one chamber 11 to allow passage for high-rate fluid flow F. Chamber 11 first fluid inlet 3 terminating at nozzle opening 3a and fluid outlet 5. Pump chamber second inlet 4 is communicated with ultrahigh vacuum chamber 10 to be evacuated. Gas is sucked off from said chamber 10 via second inlet 4 by fluid flow jet that discharges gas from pump chamber 11.
EFFECT: creation of high and ultrahigh vacuum.
13 cl, 2 dwg
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Authors
Dates
2012-10-10—Published
2009-04-09—Filed