FIELD: physics.
SUBSTANCE: in the device for electromagnetic focusing of an ion beam in a plasma accelerator with azimuthal electron drift, having an annular accelerating channel, the volume of which is penetrated by a radial magnetic field, the walls of the channel are in form of two coaxial flattened cones whose edges have a given convergence angle β, and the accelerator is equipped with an external beam magnetic focusing system operating on permanent or electromagnets. The ion beam is formed with continuous homogeneous filling of its inner volume with ions by reducing the angle a of azimuthal deviation of ions to zero using an external focusing magnetic field.
EFFECT: high current density of the ion source, eg, a stationary plasma engine or an engine with an anode layer, which increases efficiency or rate of treating the surface a substrate with a focused ion beam.
4 dwg
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