IONIC SOURCE Russian patent published in 2017 - IPC H01J27/00 

FIELD: electricity.

SUBSTANCE: ionic source contains the magnetic system under the cathode potential with the annular gap between the inner and outer poles of the system, the permanent magnet as the magnetomotive force source, the anode, mounted symmetrically to the annular gap, the working gas supply system from the anode side. The annular gap is made in the form of the cone-shaped slit. In front of the inner pole there is the additional pole in the form of the disk with the diameter smaller than the inner conical opening of the annular gap, and the outer and inner poles are made in the form of the cone, oriented with its base towards the additional pole. In the space between the inner tapered opening of the annular gap and the additional pole, the annular insert from the non-magnetic material is installed.

EFFECT: creation of the ionic source with the converging ionic beam for the ionic polishing of optical parts and increase of its service life.

2 cl, 1 dwg