INTEGRATED PRESSURE TRANSDUCER WITH ONE SOLID CENTRE Russian patent published in 2012 - IPC H01L29/84 G01L9/04 

FIELD: physics.

SUBSTANCE: integrated pressure transducer with one solid centre is in form of a monocrystalline silicon plate, on whose first side tensoresistors are formed and electrically connected into a Wheatstone bridge, and on the second side of the monocrystalline silicon plate there is a depression which does not reach the edge of the plate, consisting of two parallel grooves and two of its sections which connect ends of the parallel grooves with each other and having with them a common flat bottom which, together with the first side of the plate, forms a thin part of a membrane surrounding one solid centre obtained thus. On each straight thin section of the membrane opposite the bottom of the corresponding groove, there are tensoresistors of two arms of the Wheatstone bridge, wherein not less than 10% of the area of the bottom of the thin part of the membrane lies outside the strip bounded by two parallel straight lines which are superposed with outer boundaries of grooves belonging to the outline of the bottom of the membrane.

EFFECT: invention increases efficiency of converting pressure to an electrical signal with small values of mechanical action and broadens functional capabilities of the transducer.

5 cl, 2 dwg