INTEGRAL PRESSURE TRANSDUCER Russian patent published in 2024 - IPC G01L9/04 H01L29/84 

FIELD: measurement.

SUBSTANCE: use for measurement of mechanical effects: pressure, force, as well as high-precision measurement of low pressures of gaseous media in temperature range from minus 60 °C to plus 125 °C. Essence of the invention consists in the fact that the integral pressure converter is made in the form of a monocrystalline silicon plate oriented in plane (100), of n-type conductivity, on the first side of which p-type conductivity strain gauges are formed, elongated in the direction [011] and combined by electrical connections into a Wheatstone bridge, and on the second side of the monocrystalline silicon plate a recess is made, which does not extend to the edge of the plate and forms a thin part of the membrane, wherein each arm of the Wheatstone bridge, consisting of one or more resistive strain gauges, is arranged on a thin section of the membrane, wherein the sides of the monocrystalline silicon plate are made with side faces oriented along the crystallographic direction [100].

EFFECT: enabling reduction of pressure measurement error.

1 cl, 1 dwg