MATRIX OF IC PRESSURE TRANSDUCERS Russian patent published in 2009 - IPC H01L29/84 G01L9/04 

FIELD: robotics.

SUBSTANCE: proposed invention relates to solid-state instruments designed to convert mechanical effects into electric signal that, is measured, allows determining tactile pressure originating in contact between transducer and whatever object. Tactile transducers are intended for geometrical identification of ambient space objects that is stipulated by the development of robotics. The primary trend in the development of tactile transducers consists in reproduction of tactile properties of human skin. The proposed matrix comprises IC pressure transducers (ICPT), set up on one-piece mono-crystal silicon crystal and incorporating heat-sensitive IC-diffusion resistor- or diode-based components, which allows increasing the resolution of aforesaid transducer conversation accuracy of ICPT tensity-sensitive components. The said components are set up with regular spacing, along two orthogonal direction of previously mentioned crystal and connected into integral electric circuit by metallisation layer, which features outer leadouts. The latter serve to feed supply voltage and register output electric signal, proportional to applied pressure, coming from every ICPT. Note that it also measures the crystal temperature with the help of diffusion resistor or diode.

EFFECT: high 3D resolution and sensitivity in tactile pressure measurement.

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