MICROELECTRONIC MECHANICAL-ELECTRICAL PICKUP Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: restoring element of pickup is fabricated from monocrystalline silicon plate of orientation "100" in the form of rectangular membrane. Membrane consists of rigid base and deformable part separated from base by means of two slit holes. Deformable part includes flexible sections made by manufacture of valleys in direction "100" and rigid areas in the form of isles. Diffusion resistance strain gauges oriented along direction "100" are located over flexible sections on planar side of membrane. EFFECT: reduced dimensions, enhanced linearity and sensitivity. 1 dwg