DEVICE FOR CLIMATIC TESTS OF SEMICONDUCTOR INSTRUMENTS Russian patent published in 2013 - IPC H01L21/66 G01R31/26 

FIELD: electricity.

SUBSTANCE: in a device for climatic tests of semiconductor instruments an accumulator with a fixed helical guide installed inside a transporting driving rotor with longitudinal guides in the form of trays with transverse slots for loading and unloading of instruments, is additionally equipped with a vertical guide of instruments at the output of the receiving channel in the form of a flat ring with supporting segments, fixed on its inner generatrix and placed between edges of receiving slots of adjacent trays to form a circular surface, and a flexible tape spring-loaded with the ends relative to the receiving channel and covering receiving slots of the trays and supporting segments. The accumulator is installed on support stands installed on a plate fixed in a cantilever manner on the chamber body. The support stand installed on the free end of the plate is rigidly connected to the receiving channel, which is additionally rigidly connected to the guide tray of the loading unit. The latter is made as capable of longitudinal displacement. The other support stand is made as controlled along height and as capable of rotation around its axis. The unit of contact is rigidly connected with the chamber body, and its receiving tray is rigidly connected to the accumulator's plate at the side of the fixed end.

EFFECT: universality of device operation during transitions from low-temperature working modes to high-temperature ones and vice versa, reduction of mechanical damage of instruments and non-production costs in process of operation.

3 cl, 7 dwg