METHOD OF OBTAINING EVEN NANO-GAPS BETWEEN SURFACES OF BODIES Russian patent published in 2013 - IPC G02B5/28 

FIELD: physics.

SUBSTANCE: method can be used in making different optical, optoelectronic, quantum and micromechanical devices in which there is need to obtain a gap with an even and small thickness between electrodes or plates having a large surface area, particularly controlled Fabry-Perot interferometers. The method involves levelling one surface which is equally spaced from a second surface using a sacrificial layer and a flexible film attached to the surface by a layer of hardening medium. The sacrificial layer used is an interlayer of a surface-wetting liquid whose droplets are deposited first in a region of the surface of a first body, or said region is moistened by exposure to vapour of the liquid. A flexible film wetted by said liquid is then applied and the required surface of the second body is applied onto said flexible film through the layer of hardening medium. The liquid is removed by evaporation once the medium hardens. The volume of the deposited liquid droplets can wet the surface only within said region.

EFFECT: simple method of making devices in form of a system of bodies with ultra-small air gaps between their surfaces.

2 cl, 1 dwg