APPARATUS FOR ELECTRICALLY CONTROLLED OPTICAL DEVICE AND METHOD OF MAKING SAME Russian patent published in 2016 - IPC G02B5/28 G01J3/26 

FIELD: physics.

SUBSTANCE: apparatus comprises interconnected plates which arranged with a controlled air gap, said plates having thin-film conducting or dielectric mirrors and conducting thin-film electrodes. Conducting elements are electrically connected to external electronic devices by adjusting the gap by varying the electrostatic attraction force. The plates are stacked in columns. The first plate at the position of the columns is thinned until formation of a flat membrane, one of the planes of which coincides with the mirror plane, while at least one conducting element at the first plate is capacitively coupled to the opposite conducting element at the second plate.

EFFECT: ensuring compactness and smooth adjustment of the optical radiation transmission spectrum.

5 cl, 5 dwg