INTERFERENCE SCANNER IN FORM OF FABRY-PEROT DUAL-MIRROR INTERFEROMETER Russian patent published in 2014 - IPC G01B9/02 G02B5/28 G01J3/26 

FIELD: electricity.

SUBSTANCE: interference scanner contains substrates with mirror coating which position can be regulated by a piezoelectric element connected to the source of alternating current. Surfaces of the mirror substrates in the interferometer are interconnected by a transparent resilient continuous or discontinuous layer of even thickness thus forming a mechanical oscillator with free frequency close to the alternating voltage frequency. Young modulus of the resilient layer is less then the same value of substrates. Any substrate can be used as a piezoelectric element. Semi-hard, soft and elastic polymers, including polyamide, polyethylene, photoresist material, silicone rubber, can be used as a material for the transparent resilient layer. Optical thickness of the resilient layer is equal to half of full wave of the modulated emission. Thickness values of the oscillator components are much less than the length of elastic wave in it. In the oscillator thickness an integer number of elastic half-waves can be managed while in the substrate thickness an odd number of the elastic wave quarters can be managed.

EFFECT: increase in modulation depth of the interferometer, improvement in fast response and aperture.

6 cl, 3 dwg