HYDROGEN PERMEATION BARRIER LAYER Russian patent published in 2013 - IPC C23C14/08 C23C14/16 

FIELD: chemistry.

SUBSTANCE: method of making a hydrogen permeation barrier layer on a substrate includes a step of depositing on the substrate a layer system (LS) having at least one layer (L1; L2; L3). Said step includes physical vapour deposition of at least one layer containing at least a ternary oxide of a hydrogen barrier layer (HPBL), essentially composed of Al, Cr and O, as a hydrogen barrier layer (HPBL). An apparatus (A) which prevents hydrogen permeation has an insulated volume (V) and a wall (W), which forms at least one section of a boundary which limits said volume (V), where said wall (W) has a barrier which prevents hydrogen permeation, which includes the layer system (LS), having at least one layer (L1; L2; L3). Said layer system (LS) includes at least one said hydrogen barrier (HPBL) layer.

EFFECT: obtaining hydrogen permeation barriers which can be used in various fields while providing the required combinations of properties.

25 cl, 5 dwg