Al-Cr-O COATING APPLIED WITH ELECTRIC ARC SPRAYING, CONTAINING Si, HAVING IMPROVED PERFORMANCE Russian patent published in 2017 - IPC C23C14/08 C23C14/32 C23C28/00 C23C30/00 

FIELD: chemistry.

SUBSTANCE: invention can be used for deposition of an oxide coating, in particular Al-Cr-O, onto a substrate by physical vapour deposition (PVD). The PVD coating is applied to the substrate surface in the chamber using a process gas containing a reactive gas, in particular oxygen, reacting with metal ions obtained from, at least, one target to deposit, at least, one layer consisting of Al, Cr, Si and O. At least, one target has an elemental composition represented by the formula Al_1-x-yCr_xSi_y, where 0.05≤y≤0.10 and 0.20≤x≤0.25.

EFFECT: addition of Si prevents the formation of oxide islands on targets during the reaction coating process.

14 cl, 5 dwg