METHOD OF DETERMINING PARAMETERS OF PIEZO-EQUIPMENT PRODUCTS Russian patent published in 2013 - IPC G01R29/22 H01L41/22 

FIELD: measuring equipment.

SUBSTANCE: method includes measuring the containers of free piezoelectric elements contained directly in the product and containers of piezoelectric elements partially clamped by bonding during manufacture of the product. The difference of the containers of free and tanks partially clamped piezoelectric elements is determined. According to the difference of these containers the conformance of the product to the specified parameters is determined. In particular, the difference of the containers of piezoelectric elements caused by their partial clamping at their connection to the bimorph is determined, or the difference of the containers of the piezoelectric element caused by its partial clamping at its glue joint with the mounting seat - the membrane.

EFFECT: increasing the percentage yield and reduction of the cost of the products.

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