METHOD OF MAKING MULTILAYER PIEZOCERAMIC ELEMENTS Russian patent published in 2016 - IPC H01L41/273 

FIELD: physics.

SUBSTANCE: method includes preparing a slurry using piezoceramic powder, casting the slurry through a die on a moving belt and obtaining "raw" films from an organic binder with the piezoceramic powder, cutting solid "raw" films into group workpieces, coating a certain portion of each group workpiece through a mesh stencil with a paste with metal powder, assembling the group workpieces into n-layered stacks, hydrostatic pressing of the assembled stacks, cutting the group n-layered stacks according to the pattern of the mesh stencil into separate n-layered workpieces, removing the binder and sintering the workpieces into a monolith, metal-coating the lateral surfaces of the monolithic workpieces, polarising the monolithic workpieces, measuring parameters of the obtained monolithic multilayered (n-layered) piezoceramic elements. Before assembling the group workpieces into stacks, the group workpieces are dried and portions of each group workpiece uncoated with the paste with metal powder are coated through a second mesh stencil by a paste with piezoceramic powder. The thickness of the layer of the paste with ceramic powder is equal to that of the layer of the paste with metal powder.

EFFECT: improved process and operational characteristics of products owing to high flatness of internal electrodes.

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