MANUFACTURING METHOD OF MONOLITHIC MULTILAYER PIEZOCERAMIC ELEMENTS-COLUMNS Russian patent published in 2015 - IPC H01L41/273 

FIELD: electricity.

SUBSTANCE: method includes operations on preparation of slurry based on powder of piezoceramic material and organic bond, moulding of slurry through a die hole to a moving belt and its drying with formation of thin raw films of the bond with piezoceramic powder, cutting of solid raw films into grouped blanks, coating of each grouped blank by metal-containing paste through a net template with formation of pattern, assembly of n grouped blanks by overlapping, grouped packages, pressing of grouped packages, chipping of grouped packages in compliance with pattern of the net template into separate n-layer blanks of piezoceramic elements, assembly of raw multilayer blank columns out of m raw blanks of n-layer piezoelectric elements by their gluing with further drying, high-temperature treatment, metallisation of lateral sides, polarisation of multi-layered blank columns, measuring parameters of multilayer piezoceramic elements-columns.

EFFECT: increasing operational reliability in complicated ambient conditions, simplification of manufacturing process and reduction of its labour intensity.

2 cl, 10 dwg