PLASMA GENERATOR (VERSIONS) Russian patent published in 2013 - IPC H01J37/00 H05H1/24 

FIELD: electricity.

SUBSTANCE: in a plasma generator according to the first version of realisation, comprising a spiral coil, placed inside a conducting screen, the inner surface of which has a shape close to cylindrical one, besides, the space between turns of the coil and between the coil and the screen is filled with a dielectric, the coil is made as flat, the distance from the plane of the coil to the outer surface of the dielectric is less than the doubled thickness of the coil, and the distance from the plane of the coil to the base of the inner surface of the screen is more than the doubled distance from the plane of the coil to the outer surface of the dielectric. In the plasma generator in accordance with the second version of realisation the coil is made flat, the screen is made in the form of a ring, the axis of which is perpendicular to the plane of the coil, the edge of the ring facing the volume, in which it is required to create plasma, is closed with the dielectric. In the plasma generator according to the third version of realisation the screen is electrically connected to one of the ends of the coil, and the dielectric permeability of the dielectric is within 2.5 - 50.

EFFECT: higher efficiency of a device; higher reliability of device operation, higher purity of plasma medium and increased density of generated plasma; increased service life of a device, reduced level of noise, reduced dimensions of a device.

33 cl, 7 dwg