FIELD: nanotechnology.
SUBSTANCE: invention relates to nanoelectronics and nanoelectromechanics and can be used in various fields of modern nanotechnology industry, microelectronics, alternative energy, etc. The nanostructured coating of nanogranulated composite "metal-ceramic" predominantly (CO40Fe40B20)x(CaF2)100-x, is obtained by the method of ion beam deposition on substrates and represents a nanostructured material comprising metallic granules with an average diameter of preferably 2-6 nm, located in the volume of the ceramic matrix. The concentration of the metal phase is 20-60 at.%, preferably 30-56 at.%.
EFFECT: invention provides improved wear resistance, high dimensional stability, while reduction of costs of the protective coating.
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Authors
Dates
2014-02-10—Published
2011-11-29—Filed