METHOD OF PRODUCTION OF NANOSTRUCTURED COATING Russian patent published in 2014 - IPC C23C14/46 C23C14/06 B82B3/00 

Abstract RU 2515600 C2

FIELD: nanotechnology.

SUBSTANCE: invention relates to the technology of application of nanostructured coatings and can be used in nanoelectronics and nanoelectromechanics. The coating is prepared from the metal-ceramic composite with the structure (Co86Nb12Ta2)x(SiOn)100-x. Precipitation of the composite is carried by ion-beam sputtering to provide formation of granules with the metallic phase with an average diameter of 2-4 nm, isolated by the continuous ceramic phase. The concentration of the metal phase while sputtering is selected in the range of 20-40 at.%.

EFFECT: obtained coatings have high hardness and are characterised by high stability of parameters.

2 cl, 1 dwg, 1 ex

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RU 2 515 600 C2

Authors

Tregubov Il'Ja Mikhajlovich

Kalinin Jurij Egorovich

Sitnikov Aleksandr Viktorovich

Stognej Oleg Vladimirovich

Dates

2014-05-20Published

2011-11-29Filed