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2 515 600

(13)

(51)

IPC

C23C14/46(2006-01-01)

C23C14/06(2006-01-01)

B82B3/00(2006-01-01)

(21) (22)

Application

2011148577/02, 2011-11-29

(24)

Start date

2011-11-29

(22)

Actual filing date

2011-11-29

(45)

Published

2014-05-20

(72)

Inventor

Tregubov Il'Ja MikhajlovichKalinin Jurij EgorovichSitnikov Aleksandr ViktorovichStognej Oleg Vladimirovich

(73)

Holder

Federal'Noe Gosudarstvennoe Bjudzhetnoe Obrazovatel'Noe Uchrezhdenie Vysshego Professional'Nogo Obrazovanija Gosudarstvennyj Tekhnicheskij Universitet"

METHOD OF PRODUCTION OF NANOSTRUCTURED COATING Russian patent published in 2014 - IPC C23C14/46 C23C14/06 B82B3/00

Abstract RU 2515600 C2

FIELD: nanotechnology.

SUBSTANCE: invention relates to the technology of application of nanostructured coatings and can be used in nanoelectronics and nanoelectromechanics. The coating is prepared from the metal-ceramic composite with the structure (Co₈₆Nb₁₂Ta₂)_x(SiO_n)_100-x. Precipitation of the composite is carried by ion-beam sputtering to provide formation of granules with the metallic phase with an average diameter of 2-4 nm, isolated by the continuous ceramic phase. The concentration of the metal phase while sputtering is selected in the range of 20-40 at.%.

EFFECT: obtained coatings have high hardness and are characterised by high stability of parameters.

2 cl, 1 dwg, 1 ex

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RU 2 515 600 C2

Authors

Tregubov Il'Ja Mikhajlovich

Kalinin Jurij Egorovich

Sitnikov Aleksandr Viktorovich

Stognej Oleg Vladimirovich

Dates

2014-05-20—Published

2011-11-29—Filed