FIELD: nanotechnology.
SUBSTANCE: invention relates to nanoelectronics and nanoelectromechanics and can be used in various fields of modern nanotechnology industry, microelectronics, alternative energetics, etc. The nanostructured coating is formed from the nanocomposite ceramic-metal material of the composition (CO86Nb12Ta2)x(SiOn)100-x, obtained on ceramised substrate by ion-beam sputtering and having a structure consisting of granules of the metal phase with an average diameter of 2-4 nm, isolated by the continuous ceramic phase, at that the concentration of the metal phase is 20-40 at.%.
EFFECT: improved properties of the coating.
2 cl, 1 dwg
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