FIELD: nanotechnology.
SUBSTANCE: invention relates to nanoelectronics and nanoelectromechanics and can be used in various fields of modern nanoindustry, microelectronics, alternative energy, etc. The wear-resistant nanostructured coating is made of nanocomposite metal-ceramic material obtained on ceramised substrate by ion-beam sputtering, and has a structure consisting of granules of the metal phase with an average diameter of 2-4 nm, isolated by the metal phase, at that the concentration of the metal phase constitutes 30-56 at. %.
EFFECT: creation of nanostructured metal-ceramic coating having high wear resistance and stability of the parameters.
1 ex, 1 dwg
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Authors
Dates
2014-07-10—Published
2011-11-29—Filed