METHOD OF PRODUCING THIN-LAYER, THERMALLY AND/OR OPTICALLY STIMULATED LUMINESCENCE EFFECT BASED NUCLEAR RADIATION CHARGED PARTICLE DETECTOR BASED ON ALUMINIUM OXIDE Russian patent published in 2014 - IPC H01L21/00 B82B1/00 

FIELD: physics.

SUBSTANCE: method involves evaporating a target of starting material with a pulsed electron beam with energy of not more than 100 keV, pulse duration of 20-300 mcs, energy density of not less than 1 MJ/cm²; a beam of electrons on the path to the target is passed through a system of generating a gas pressure drop, through which pressure of 1-20 Pa is provided in the evaporation chamber in order to cool particles, wherein particles are deposited on cooled substrates made of metal whose melting point is higher than 900°C, and the coefficient of linear thermal expansion is close to that of the deposited layer of aluminium oxide, the thickness of which is controlled in the range of 5-40 mcm by deposition time of 5-20 minutes, and radiation sensitivity is controlled by final heat treatment in the range of 550-900°C for 10-20 minutes.

EFFECT: high accuracy and reliability of detecting doses of short-range charged particles of nuclear radiations, including complex fields using TL or OSL techniques.