DEVICE TO MEASURE RESONANT FREQUENCIES AND GOOD QUALITY OF MOVABLE ELEMENTS OF MICROMECHANICAL DEVICES Russian patent published in 2014 - IPC G01H13/00 

FIELD: measurement equipment.

SUBSTANCE: device to measure resonant frequencies and good quality of movable elements of micromechanical devices comprises a generator, an amplitude controller, a power amplifier, a vibration stand, on the movable part of which the investigated MEMS is fixed, a source of radiation. The device additionally contains a position-sensitive photodetector and units of signal processing from the position-sensitive element, and a point source of radiation is taken.

EFFECT: higher accuracy of measurement of resonant frequencies and determination of good quality of MEMS elements, reduced time of measurement.

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