FIELD: measuring technology.
SUBSTANCE: invention refers to measuring technology and can be implemented for control over quality of micro-mechanical elements. The method of measurement of micro electro-mechanical system - MEMS consists in fastening MEMS on a movable part of a shake table driven to oscillatory motion with alternate frequency; further radiation from a linear source of light is directed to MEMS, also axis along longer side of the linear source of light is parallel to axis of MEMS rotation; a reflected image in form of line is controlled; notably, resonance moment is fixed by maximal value of width of line reflected from controlled MEMS.
EFFECT: upgraded accuracy of MEMS element control, decreased time of measurement.
2 dwg
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