METHOD AND APPARATUS FOR NEUTRON DOPING OF SUBSTANCE Russian patent published in 2014 - IPC C30B31/20 H01L21/263 G21G1/06 

Abstract RU 2514943 C1

FIELD: chemistry.

SUBSTANCE: method for neutron doping of a substance involves slowing down fast source neutrons with a retarder substance, forming a stream of slow neutrons in a selected region and irradiating the substance to be doped with the slow neutrons. During the slowing down process, the fast source neutrons are separated according to propagation angles thereof; streams thereof moving a direction selected by the structure of the retarder substance are selected; streams selected by the structure are summed up, formed into a narrow band and directed onto the substance to be doped, which is controllably moved in the focal region of the neutron streams.

EFFECT: high efficiency of the doping process and forming regions with high degree of doping in given areas of the doped substance.

5 cl, 3 dwg, 3 ex

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RU 2 514 943 C1

Authors

Petrov Georgij Nikolaevich

Prokhorov Aleksandr Kirillovich

Gushchin Vitalij Veniaminovich

Drobyshevskij Jurij Vasil'Evich

Stolbov Sergej Nikolaevich

Nekrasov Sergej Aleksandrovich

Dates

2014-05-10Published

2012-12-25Filed