METHOD OF CONTROLLING QUALITY OF DIAMOND PLATES DESIGNED FOR MAKING IONISING RADIATION DETECTORS Russian patent published in 2014 - IPC H01L21/66 

FIELD: physics.

SUBSTANCE: method of controlling quality of diamond plates designed for making ionising radiation detectors includes detecting luminescence in two bands with maxima at 420 nm and 520 nm; associating a diamond plate with a group of low-voltage detectors upon observing two luminescence bands at the same time and associating the diamond plate with a group of high-voltage detectors in the absence of luminescence in the 520 nm band and presence of luminescence in the 420 nm band. Measurement is carried out at temperature in the range of -40°C to -10°C. An electric field is applied to a diamond plate with electrodes and voltage is slowly increased while simultaneously measuring current through the plate. If a current jump occurs, accompanied by luminescence in a band with a maximum at 520 nm, the diamond plate is associated with a group of low-voltage detectors and if there is no luminescence in the band with a maximum at 520 nm, the diamond plate is associated with a group of high-voltage detectors.

EFFECT: simple equipment used for inspection and shorter inspection time.