FIELD: measurement equipment.
SUBSTANCE: invention relates to equipment for control of tightness of microelectromechanical and microelectronic devices, for functioning of which a tight body is required with an internal cavity. Substance: the device comprises a chamber of exposition of microstructures in probe gas, a spectrometer operating in infrared range, and a unit of control of wave guide positioning. In the exposition chamber there are two wave guides, one of which is used to supply infrared radiation from the spectrometer to the microstructure, and the other one - for reception and transmission of radiation that has gone via the microstructure, to the infrared spectrometer.
EFFECT: measurement of quantity characteristics of leak-in with high accuracy, automatic testing of microstructures by group method, also microstructures that are sealed integrally as "plate to plate", measurement of high leaks in small volumes, detection of hidden defects of encapsulation.
2 cl, 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF CONTROLLING TIGHTNESS OF ARTICLES | 2015 |
|
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| 0 |
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| 0 |
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SU1670480A1 | |
| LEAK DETECTION METHOD | 1999 |
|
RU2164359C2 |
