APPLICATION OF COATING BY MAGNETRON SPRAYING AND SUBSTRATE HOLDER BASED THEREON Russian patent published in 2015 - IPC C23C14/56 C23C14/24 

Abstract RU 2539487 C2

FIELD: process engineering.

SUBSTANCE: set of inventions relates to application of coating by magnetron spraying and substrate holder based thereon and can be used in machine building, application of nano-coats, ads, etc. Substrates are fitted in place and locked to spray their surfaces with the help of holder. Said holder consists of at least one module with adapter frame to turn in vertical or horizontal plane with locations for substrates. Then, adapter frame is fitted in cartridge to displace cartridges to wait or working position. At fitting the adapter frame to working position, is it turned in horizontal or vertical plane to vary the position of substrates relative to plasma source.

EFFECT: access of working medium to all surfaces, higher efficiency and flexibility.

8 cl, 12 dwg

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RU 2 539 487 C2

Authors

Miroshnikova Vera Dmitrievna

Shugalov Aleksandr Valer'Evich

Miroshnikova Tat'Jana Dmitrievna

Dates

2015-01-20Published

2012-05-03Filed