FIELD: process engineering.
SUBSTANCE: set of inventions relates to application of coating by magnetron spraying and substrate holder based thereon and can be used in machine building, application of nano-coats, ads, etc. Substrates are fitted in place and locked to spray their surfaces with the help of holder. Said holder consists of at least one module with adapter frame to turn in vertical or horizontal plane with locations for substrates. Then, adapter frame is fitted in cartridge to displace cartridges to wait or working position. At fitting the adapter frame to working position, is it turned in horizontal or vertical plane to vary the position of substrates relative to plasma source.
EFFECT: access of working medium to all surfaces, higher efficiency and flexibility.
8 cl, 12 dwg
Title | Year | Author | Number |
---|---|---|---|
ROTOR SUBSTRATE HOLDER | 2012 |
|
RU2543023C2 |
CROWN SUBSTRATE CARRIER | 2017 |
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RU2673253C2 |
FLEXIBLE PRODUCTION SYSTEM | 2012 |
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RU2510320C2 |
SUBSTRATE HOLDER AND INSTALLATION FOR APPLICATION OF COATING BY METHOD OF MAGNETRON SPUTTERING ON ITS BASE | 2010 |
|
RU2437964C2 |
METHOD OF CARGO EXCHANGE, CARGO EXCHANGE DEVICE, METHOD OF FORMING ACCUMULATOR CARGO-BEARING SURFACE AND FLEXIBLE PRODUCTION SYSTEM BASED THEREON | 2011 |
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RU2486045C1 |
AUTOMATED SYSTEM OF TOOLING BACKUP | 2010 |
|
RU2436665C1 |
DEVICE TO STORE (ACCUMULATE) BREAKBULK CARGO | 2008 |
|
RU2408517C2 |
LOAD HOISTING PLATFORM OF RACK PILER CRANE | 0 |
|
SU1174349A1 |
BICYCLE (VERSIONS), BICYCLES WHEELS, BICYCLE DRIVE, BICYCLE LEVER MECHANISM, BICYCLE PEDAL MECHANISM AND SET COMPRISING BICYCLE AND TRAILER | 2007 |
|
RU2373101C2 |
ARRANGEMENT FOR DIAMOND BURNISHING OF WORKPIECES | 0 |
|
SU1555113A1 |
Authors
Dates
2015-01-20—Published
2012-05-03—Filed