ROTOR SUBSTRATE HOLDER Russian patent published in 2015 - IPC C23C14/35 C23C14/56 

FIELD: machine building.

SUBSTANCE: invention relates to the systems for nano coating application, in particular to the rotor substrate holder. The rotor substrate holder has a modular design. The module consists of the attachable rotor installed using the rotary holder on a support and coupled with the rotation drive, and time check sensor in standby position. The support of the substrate holder by its end parts is fixed in the draw-out housing. It has a modular cylindrical design and comprises a guiding sleeve, movement sleeve, spline shaft. The attachable rotor has a capability of independent piece-by- piece, and also group transmission in one of the fixed positions: standby or processing. The attachable rotor is mounted on the shaft installed in a holder hatch with a possibility of rotation with reference to it in a working position. The shaft by means of the bevel gear, mounted in its lower part, when the attachable rotor is placed into a working position, is set into a rotational motion by the bevel gear of the head mounted on the splined shaft with a possibility of reciprocative movements. The head is fed into the engagement zone by means of two intersected slots, one of which is located on the guiding sleeve, and another one - on the movement sleeve.

EFFECT: possibility of access of working medium to all processed surfaces of the substrate in a single mount.

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