FIELD: technological processes.
SUBSTANCE: invention relates to the field of devices used for deposition on nanocoverings by magnetron sputtering. Crown substrate carrier comprises a body, a substrate-bearing surface (SBS) made sectional, with the formation of a movable connection of sections with a support installed in the body of the substrate carrier, the sections being equipped with controlled independent displacement drives relative to the support, which is made in the form of a drive frame arranged to perform cyclic movements with respect to the vertical axis, and the SBS is configured to be opened, folded and locked in any intermediate position by means of controllable stand-alone drives of displacements and autonomous control devices of the movement sequence.
EFFECT: use of the invention makes it possible to expand the technological capabilities of the substrate carrier and improve the quality of the coating application.
6 cl, 7 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| APPLICATION OF COATING BY MAGNETRON SPRAYING AND SUBSTRATE HOLDER BASED THEREON | 2012 |
|
RU2539487C2 |
| ROTOR SUBSTRATE HOLDER | 2012 |
|
RU2543023C2 |
| FLEXIBLE PRODUCTION SYSTEM | 2012 |
|
RU2510320C2 |
| SUBSTRATE HOLDER AND INSTALLATION FOR APPLICATION OF COATING BY METHOD OF MAGNETRON SPUTTERING ON ITS BASE | 2010 |
|
RU2437964C2 |
| METHOD OF CARGO EXCHANGE, CARGO EXCHANGE DEVICE, METHOD OF FORMING ACCUMULATOR CARGO-BEARING SURFACE AND FLEXIBLE PRODUCTION SYSTEM BASED THEREON | 2011 |
|
RU2486045C1 |
| AUTOMATED SYSTEM OF TOOLING BACKUP | 2010 |
|
RU2436665C1 |
| DEVICE TO STORE (ACCUMULATE) BREAKBULK CARGO | 2008 |
|
RU2408517C2 |
| STORING DEVICE | 0 |
|
SU1172840A1 |
| AUTOMATED FLEXIBLE MANUFACTURING SYSTEM | 0 |
|
SU1351747A1 |
| GASEOUS-VAPOR DEPOSITION APPARATUS | 2000 |
|
RU2194088C2 |
