FIELD: testing technology.
SUBSTANCE: invention relates to the field of leakage testing of equipment. The essence: the device comprises a mass spectrometer tube (2) made with the ability to detect gas for the search of leaks, and the turbomolecular pump (3). The turbomolecular pump (3) has a plurality of stages of rotors (33) and stators (34) which are alternately arranged in the housing (31), at that the rotors (33) are attached to the rotating shaft (32). In addition, the turbomolecular pump (3) comprises a source (35) of the drive made with the ability to drive the rotation of the rotating shaft (32). The inlet opening (36) communicating with the test sample (TP), and the connecting opening (37) which is connected with the mass spectrometer tube (2) are spaced from each other on the surface (31a) of the wall of the housing (31). At that the surface (31a) of the wall is facing the rotor (33a) of the upper stage. Leakage detection is carried out, prompting the gas for searching the leaks to enter into the mass spectrometer tube (2) inside the test sample (TP).
EFFECT: increase in sensitivity and operational efficiency when detection of leaks.
4 dwg
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Authors
Dates
2015-03-27—Published
2011-09-29—Filed