FIELD: instrumentation.
SUBSTANCE: double-sided interferometer comprises two lasers with stabilised emission frequency, a circular three-mirror interferometer and two applied holograms, one of which is recorded by emission of one laser, the other one - of the other laser. Applied holograms are illuminated by two light beams, which, having passed through holograms, generate an interferential picture in the form of an interferential strip of unlimited width. Three measurements of difference of phases of interfering waves are made at wavelength of radiation wave of each laser. The first measurement, when one of beams, illuminating holograms, is reflected from one measurement surface of the gauge rod installed in the circular three-mirror interferometer, the second measurement, when this light beam reflects from the second measurement surface of the gauge rod. The third measurement is performed, when this light beam passes the circular three-mirror interferometer in absence of the gauge rod in the interferometer.
EFFECT: reduced dimensions of an inteferometer.
8 cl, 9 dwg
Title | Year | Author | Number |
---|---|---|---|
HOLOGRAPHIC INTERFEROMETER | 0 |
|
SU607460A1 |
INTERFEROMETER TO MEASURE FORM OF SURFACE OF OPTICAL ARTICLES | 2001 |
|
RU2186336C1 |
METHOD AND DEVICE FOR INTERFEROMETRIC MEASURING OF SHAPE DEVIATION OF OPTICAL SURFACES | 2002 |
|
RU2263279C2 |
INTERFERENCE MICROSCOPE | 2013 |
|
RU2527316C1 |
DEVICE FOR PHASE OBJECT STUDIES | 0 |
|
SU1656317A1 |
0 |
|
SU1670425A1 | |
METHOD OF INTERFERENCE MICROSCOPY | 2013 |
|
RU2536764C1 |
INTERFEROMETER WITH DIFFERENTIAL MEASUREMENT FUNCTION | 2020 |
|
RU2744847C1 |
METHOD OF INVESTIGATING PHASE OBJECTS | 0 |
|
SU1229567A1 |
DEVICE FOR MEASURING SURFACES | 0 |
|
SU1770738A1 |
Authors
Dates
2015-07-27—Published
2014-03-04—Filed