INTERFEROMETER WITH DIFFERENTIAL MEASUREMENT FUNCTION Russian patent published in 2021 - IPC G01B9/02 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment. The interferometer with the function of differential measurements includes a laser, an expander, a beam splitter in the form of an optical wedge, a standard flat mirror with angular orthogonal movements and a linear axial piezo drive connected to the computer through a control unit located in the working branch, a reference lens, a projection system and a matrix photodetector connected to a computer, while the reference flat mirror with a linear piezo drive is additionally placed on an angular piezo drive connected to the computer through a control unit, and replaceable compensators of spherical aberration are installed in front of the reference lens in the working branch.

EFFECT: invention expands functional capabilities of the interferometer by providing operation in the amplitude, phase and moire modes with increased measurement range of differential aberrations of optical surfaces and increased accuracy of operation in the amplitude mode.

1 cl, 2 dwg