MULTIPLE-ENERGY X-RAY IMAGING METHOD Russian patent published in 2015 - IPC G01N23/04 

FIELD: physics.

SUBSTANCE: method includes taking a series of images at different anode voltages, the different anode voltages being achieved by taking images at different moments in time under the effect of alternating or pulsating anode voltage which powers the X-ray tube, wherein the method also includes taking a series of images at different anode current values, the different anode current values being achieved by taking images at different moments in time under the effect of alternating or pulsating anode current flowing through the X-ray tube; by processing the images, an image is obtained on which a given contrast is provided for all functional elements (units) of the microelectronic article with an non-uniform structure.

EFFECT: providing a multiple-energy X-ray imaging method, which broadens the capabilities of digital X-ray imaging of microelectronic articles with a non-uniform structure by improving reliability and speed of radiographic nondestructive inspection.

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