METHOD OF MEASURING ENERGY SPECTRUM OF IONS Russian patent published in 2015 - IPC H01J49/48 

FIELD: physics.

SUBSTANCE: method includes applying a positive potential on a separating gauze, the value of said positive potential being greater than the positive potential of the plasma. As a result, ions of the background plasma do not fall on the collector and there is no distortion of the energy spectrum of ions of the plasma flux in the analyser-plasma system; ions accelerated in the field of the plasma potential in the space between the separating gauze and the input gauze are decelerated to initial energies; plasma electrons do not fall into the analyser due to deceleration in the field of the plasma potential.

EFFECT: prevention of distortion of the energy spectrum of ions of plasma flux in the analyser-plasma system is achieved due to that in an analyser with a retarding potential at fixed potential of the input gauze between the separating and analysing gauzes, a decelerating electric field is generated when a positive potential, having a value ranging from zero to a value which is equivalent to the maximum energy in the spectrum of the analysed ions, is applied on the analysing gauze.

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