MICROMECHANICAL FIBRE-OPTIC PRESSURE SENSOR Russian patent published in 2015 - IPC G01L11/02 G01L1/24 G01L9/04 

FIELD: measurement equipment.

SUBSTANCE: micromechanical fibre-optic pressure sensor is made on the basis of optic fibre, containing sections of radiation input and output, and also a section placed in a throughput channel of the body. At the same time the throughput channel includes a section for installation of an optical cable in parallel to the base of the body and is made in the form of a slot with corrugated surface in the base. The fibre in the slot is pressed to ledge tops of the corrugated surface by plates and is made with Bragg gratings. Plates are made in the form of silicon crystals, on which membranes of identical thickness hm are formed, at the same time the first membrane has one square stiff centre placed in the centre, the second membrane - two identical square stiff centres arranged along the optic fibre section at the distance l at both sides from the membrane centre.

EFFECT: increased accuracy of measurement due to increased sensitivity of a micromechanical fibre-optic pressure sensor.

4 cl, 4 dwg, 1 tbl