FIELD: measurement equipment.
SUBSTANCE: capacitance measurement system comprises a sensor (30), having a thin-film structure, having the first insulating layer (34) and the first conducting film, comprising a measuring electrode (31), formed on the first surface of the first insulating layer (34), and the second conducting film, comprising a rear guard electrode (35). The rear guard electrode is formed in a single plane, comprises a peripheral area in the same plane and is arranged on the second surface of the first insulating layer (34) and the first surface of the second insulating layer (43) or a protective layer (38). The peripheral part of the rear guard electrode protrudes beyond the limits of the measuring electrode (31), forming a side guard electrode, which substantially or fully surrounds the measuring electrode.
EFFECT: simplified manufacturing and provision of accuracy.
14 cl, 32 dwg
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