METHOD FOR EXAMINATION OF ELECTRIC RESISTANCE-TEMPERATURE DEPENDENCE FOR FILM SAMPLES AT HEATING Russian patent published in 2016 - IPC G01N25/00 G01R27/00 B82B3/00 

FIELD: electricity.

SUBSTANCE: invention relates to the field of nano-electronics and may be used in different sectors of nano-industry. The invention claims the method for examination of electric resistance-temperature dependence for film samples at heating. In order to heat a film sample and to change its electric resistance a sample is placed into quartz reactor comprised of a body with resistance heater wound in bifilar way at its outer surface, and in the central part of the body wall there is a thermal converter capable to change temperature of the above sample. At that a sample is inserted inside the body in C-shaped clamps with flat jaws made of tungsten wire. C-shaped clamps are unfastened at tie-rods made as springs of tungsten wire with less diameter. Thereafter by means of the resistance heater placed at the body surface a sample is heated up to the preset temperature. Through C-shaped clamps and tie-rods measuring current is delivered to a sample and voltage is determined. The required distance from the sample surface up to the measuring element of thermocouple converter and its centring in regard to the thermocouple converter is set by the above tie-rods.

EFFECT: higher accuracy of obtained data.

1 dwg