PASSIVE WIRELESS SURFACE ACOUSTIC WAVE SENSOR FOR MEASURING CONCENTRATION OF CARBON MONOXIDE Russian patent published in 2016 - IPC H03H9/25 

FIELD: test and measurement equipment.

SUBSTANCE: invention relates to piezoelectric sensors intended for remote control of various physical and chemical values. Gas-sensitive element is made of two parts, one of which is located inside sealed housing on a piezoelectric acoustic line between adjacent SAW reflectors and comprises two inserted one into another partitioned IDT, first section IDT have upper common bus, and second section IDT have lower common bus, buses of sections of first IDT located between sections of second IDT are connected by a meander electrode, common for both IDT, wherein buses of first IDT is lower bus and meander electrode, and buses of second IDT are upper bus and meander electrode, and second part of gas-sensitive element is located outside sealed housing and is composed of two gas-sensitive films, having same impedance and made in form of arrays of zinc oxide nanorods connected in parallel, each gas-sensitive film is arranged on sapphire substrate and has upper and lower electrodes, which are connected to each of partitioned IDT, respectively.

EFFECT: technical result is prevention of destruction interdigital transducers (IDT) and reflectors, increasing sensitivity and reducing SAW attenuation.

5 cl, 2 dwg