PASSIVE TEMPERATURE SENSOR OPERATING ON SURFACE ACOUSTIC WAVES Russian patent published in 2016 - IPC G01K11/24 H01L41/08 

FIELD: measuring equipment.

SUBSTANCE: invention can be used for remote control of temperature. Disclosed is temperature sensor on surface acoustic waves, having sealed housing, in which there is piezoelectric acoustic line with high temperature coefficient of delay (TDC) about 10^-4 1/degree. On working surface there are interdigital transducers (IDT) with same central frequency f₀, one of which is loaded on receiving-transmitting antenna, and other IDT is reflective. There is one more piezoelectric acoustic line with small TDC in 50-100 times less as compared with TDC of about 10^-4 1/c, on which there are also two IDT with same central frequency f₀, one of which is connected electrically to receiving-transmitting antenna in parallel with IDT located on acoustic line with large TDC, and other IDT is reflecting. Distance between centres of these IDT are selected so that reflected signal delay on piezoelectric acoustic line with small TDC and on acoustic line with large TDC at room temperature would be identical or differ by value of 1/(4f₀), and corresponding IDT located on different piezoelectric acoustic ducts, should have same bandwidth.

EFFECT: high accuracy of measuring temperature.

2 cl, 1 dwg