METHOD OF INTRODUCTION OF ELECTRON BEAM INTO MEDIUM WITH INCREASED PRESSURE Russian patent published in 2017 - IPC B01J19/08 C23C14/00 C23C16/513 C23C16/54 C23C26/00 H01J37/32 

FIELD: physics.

SUBSTANCE: invention relates to method of inputting electron beam into medium with increased pressure, whereat gas is fed through system of feeding in nozzle unit consisting of two circular nozzles (internal and external, along axis of internal annular nozzle there is hole for passage of electron beam), at expansion of which into medium with increased pressure in paraxial area of flow “zone of tranquillity” is formed, parameters of which depend only on parameters determining operation of internal annular nozzle (in particular, its geometry and gas flow rate), being part of transport channel for introduction of electron beam from electron gun into medium with increased pressure. Wherein electron beam before entering medium with increased pressure passes through return flow pumping section, and gas flow rate of internal and external annular nozzles G₁ and G₂ is maintained so that ratio of G₂/G₁ is in range of 7–8.

EFFECT: invention allows simplifying system of lock chambers and reducing total number of chambers of system.

1 cl, 6 dwg, 3 ex