FIELD: electronic devices. SUBSTANCE: device has pumped processing chamber and electron gun which are separated by hole for electron beam. In addition device has working gas supply unit which output pipe (hole, nozzle, grating and so on) is located on side of gun before hole for electron beam transmission. Pressure of working gas in this space is greater than pressure in processing chamber by 2.5 times. Size of holes for electron beam transmission conforms to condition $$$, where $$$ is Knudsen factor. Light gas which atomic number is not greater than 30 serves as working gas. EFFECT: increased functional capabilities. 2 cl
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