FIELD: nanotechnology.
SUBSTANCE: invention pertains to the method and device for obtaining nanopowder from different materials. Method includes the vapourisation of the target with an electron beam, condensing of vapour of the material in the evaporation chamber and precipitation of nanopowder. Vapourisation of the target is carried out with a pulse electron beam with energy of no more than 100 keV, length of the pulses from 20 to 300 microseconds, energy density of not less than 1 MJ/cm2. Electron beam passes through the system for creating gas differential pressure, with whose help pressure in the range of 1-20 Pa is created in the evaporation chamber to cool particles, their precipitation is carried out on the cooled rotating disk. Device for the realisation of this method contains a pulse electron beam with a hollow cathode, wiring system and electron beam focusing, evaporation chamber, target and powder collecting system. Powder collecting system is made in the form of a cold rotating disk with a scraper, and a wiring system and electron beam focusing contains a system for creating gas differential pressure, consisting of a gas-dynamic nozzle, which is made with the capability of creating pressure in the range of 1-20 Pa is in the evaporation chamber.
EFFECT: invention makes it possible to obtain nanopowder with a typical size 3-5 nm and agglomerate from them with high productivity and low power costs.
2 cl, 4 dwg, 3 tbl
