FIELD: physics.
SUBSTANCE: method for manufacturing the diffraction grating comprises vacuum deposition of the aluminium coating and stroke formation of the triangular microprofile with the diamond pitch machine cutter. In addition, the diffraction grating is placed in the vacuum chamber for ion-beam etching, in which the correction of the triangular stroke microprofile is produced by removing the "pile" on the non-working stroke brink by targeting the ion flow of inert gas to the surface microprofile.
EFFECT: increasing the diffraction efficiency and reducing the parasitic scattered light level.
2 dwg
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