FIELD: physics.
SUBSTANCE: method comprises the following stages: illuminating the object by irradiation of, at least, one coherent radiation source to form a diffraction fringe (a diffraction border) at both ends of the geometric shadow cast by the object, and registering the spatial intensity profile of, at least, one diffraction fringe by, at least, one linear or multilinear optical sensor. Then, derivation of, at least, one registered intensity profile on the coordinate coinciding with the axis of the receiver elements and plotting the resulting profile on the quadratic coordinate axis, are performed. Next, comparising of, at least, one registered intensity profile differentiated by the said coordinate with, at least, one periodic reference intensity profile and determining based on the position comparison of, at least, one object edge, are performed.
EFFECT: improving accuracy of the diffraction pattern analysis.
23 cl, 8 dwg
