METHOD AND DEVICE FOR MEASURING GEOMETRICAL STRUCTURE OF OPTICAL COMPONENT Russian patent published in 2017 - IPC G01B11/24 G01M11/02 

Abstract RU 2618746 C2

FIELD: physics.

SUBSTANCE: method includes the stages (S1) of the first signal measurement (MS1) resulting from the first conversion by the first specified surface (10) of the first signal (PS1) from the sensor (S2); the second signal measurement (MS2) resulting from the second conversion by, at least, the second specified surface (20) of the second signal (PS2) from the sensor; (S3) the third conversion determination enabling the conversion from the first set of the coordinates (R1) associated with the first signal measurement (MS1) to the second set of the coordinates (R2) associated with the second signal measurement (MS2); (S10) the evaluation of the first specified surface (10) carried out on the basis of the first signal (MS1) of the first specified simulation and the first quality indicator (VI) determining the difference between the first estimate (ES1) and the first signal (MS1); and (S20) the evaluation of the second specified surface (20) carried out on the basis of the second signal (MS2), the second specified simulation, the third specified conversion and the second quality value (V2) determining the difference between the estimate (ES2) and the second signal (MS2).

EFFECT: simplificating and accelerating the measurements.

18 cl, 5 dwg

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RU 2 618 746 C2

Authors

Ge Stefan

Lavijoner Nikola

Murador Faben

Lakkhua Asma

Dates

2017-05-11Published

2013-03-08Filed