FIELD: machine engineering.
SUBSTANCE: invention relates to a manipulator (1) for dynamic positioning bases (2) to be processed, the thermal spraying method for applying a structured functional layer (20) covering the substrate (2) and a device for its implementation. Pointing device (1) includes a main drive shaft (30) rotatable around the main axis (3) rotating the connecting element (4) and the holder (5) of the substrate, configured to be connected to the connecting member (4). The connecting element (4) is a ceramic connecting element (4). The connecting segment (51) of the holder (5) of the substrate is configured to connect with the connecting element (4) with compound "insert - turn" and the prevention of taking out without possibility of rotation about the axis (V) of the compound. Holder (5) of the substrate is mounted rotatably about mentioned axis (V) compound. Base (2) to be coated is placed on the holder (5) of the manipulator. Sputtering is performed in the chamber. The holder (5) with the base (2) is rotated about the main axis (3), wherein the first substrate surface and the second surface of the substrate are aligned against each other with providing deflection part coating material transferred to the vapor phase from the first surface to the second by plasma spraying.
EFFECT: simplified design, increased accuracy of movements.
14 cl, 18 dwg
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Authors
Dates
2017-06-27—Published
2012-03-16—Filed