DEVICE FOR PRODUCTS POLISHING Russian patent published in 2017 - IPC B24B37/10 H01L21/304 

Abstract RU 2632045 C2

FIELD: technological processes.

SUBSTANCE: device contains a polishing plate having a top surface with a polishing cloth and rotatably mounted in a horizontal plane. Above the polishing plate an upper ring is provided with the ability to move up and down and rotate in the horizontal plane. The carrier plate is located between the polishing plate and the upper ring. A stop is provided for stopping and holding the carrier plate moving to the underside of the upper ring by turning the polishing plate in the polishing position.

EFFECT: providing the device that is small in size and simple in design.

8 cl, 7 dwg

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RU 2 632 045 C2

Authors

Morozumi, Eiti

Koyama, Kharumiti

Kasuo, Manabu

Vada, Masaki

Dates

2017-10-02Published

2013-06-19Filed